Varian Semiconductor Equipment Associates Assigned Patent
(Targeted News Service Via Acquire Media NewsEdge) By Targeted News Service
ALEXANDRIA, Va., Feb. 16 -- Varian Semiconductor Equipment Associates, Gloucester, Mass., has been assigned a patent (8,372,737) developed by Nicholas P.T. Bateman, Reading, Mass., Benjamin B. Riordon, Newburyport, Mass., and Atul Gupta, Beverly, Mass., for an "use of a shadow mask and a soft mask for aligned implants in solar cells."
The abstract of the patent published by the U.S. Patent and Trademark Office states: "An improved method of implanting a solar cell is disclosed. A substrate is coated with a soft mask material. A shadow mask is used to perform a pattern ion implant and to set the soft mask material. After the soft mask material is set, the mask is removed and a blanket implant is performed."
The patent application was filed on June 28, 2011 (13/170,792). The full-text of the patent can be found at http://patft.uspto.gov/netacgi/nph-Parser Sect1=PTO2&Sect2=HITOFF&p=1&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=1&f=G&l=50&co1=AND&d=PTXT&s1=8,372,737&OS=8,372,737&RS=8,372,737
Written by Satyaban Rath; edited by Hemanta Panigrahi.
(c) 2013 Targeted News Service
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