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Intermolecular Assigned Patent
(Targeted News Service Via Acquire Media NewsEdge) By Targeted News Service
ALEXANDRIA, Va., March 3 -- Intermolecular, San Jose, Calif., has been assigned a patent (8,383,430) developed by six co-inventors for "methods of combinatorial processing for screening multiple samples on a semiconductor substrate." The co-inventors are Guarav Verma, San Jose, Calif., Tony P. Chiang, Campbell, Calif., Imran Hashim, Saratoga, Calif., Sandra G. Malhotra, San Jose, Calif., Prashant B. Phatak, San Jose, Calif., and Kurt H. Weiner, San Jose, Calif.
The abstract of the patent published by the U.S. Patent and Trademark Office states: "In embodiments of the current invention, methods of combinatorial processing and a test chip for use in these methods are described. These methods and test chips enable the efficient development of materials, processes, and process sequence integration schemes for semiconductor manufacturing processes. In general, the methods simplify the processing sequence of forming devices or partially formed devices on a test chip such that the devices can be tested immediately after formation. The immediate testing allows for the high throughput testing of varied materials, processes, or process sequences on the test chip. The test chip has multiple site isolated regions where each of the regions is varied from one another and the test chip is designed to enable high throughput testing of the different regions."
The patent application was filed on Feb. 17, 2012 (13/399,719). The full-text of the patent can be found at http://patft.uspto.gov/netacgi/nph-Parser Sect1=PTO1&Sect2=HITOFF&d=PALL&p=1&u=%2Fnetahtml%2FPTO%2Fsrchnum.htm&r=1&f=G&l=50&s1=83,83,430.PN.&OS=PN/83,83,430&RS=PN/83,83,430
Written by Kusum Sangma; edited by Anand Kumar.
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(c) 2013 Targeted News Service
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