SemEquip Assigned Patent
(Targeted News Service Via Acquire Media NewsEdge) By Targeted News Service
ALEXANDRIA, Va., Jan. 2 -- SemEquip, North Billerica, Mass., has been assigned a patent (8,618,514) developed by Thomas N. Horsky, Boxborough, Mass., and Dale C. Jacobson, Salem, N.H., for an "ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions."
The patent application was filed on Nov. 2, 2011 (13/287,259). The full-text of the patent can be found at http://patft.uspto.gov/netacgi/nph-Parser?Sect1=PTO2&Sect2=HITOFF&p=2&u=%2Fnetahtml%2FPTO%2Fsearch-bool.html&r=61&f=G&l=50&co1=AND&d=PTXT&s1=20131231.PD.&s2=%28MA.ASST.%29&OS=ISD/12/31/2013+AND+AS/MA&RS=ISD/12/31/2013+AND+AS/MA
Written by Kusum Sangma; edited by Jaya Anand.
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